Said Touimi, Isabelle Jauberteau, Sébastien J. Weber, Annie Bessaudou, Armand Passelergue, et al.. Nitriding process at low temperature for thin metal films in (Ar-N2-H2) expanding ternary plasma.
Innovations in Thin Films Processing and Characterization (IFTPC), Nov 2009, Nancy, France.
⟨hal-00438452⟩