Romain Stefanini, Matthieu Chatras, Pierre Blondy, Gabriel Rebeiz. Miniature MEMS switches for RF applications.
Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers, 2011, 20- issue 6 (Article n°6070943), pp.1324-1335.
⟨10.1109/JMEMS.2011.2170822⟩.
⟨hal-00682967⟩