A quasi bistable RF-MEMS switched capacitor

Abstract : This paper presents a novel concept for the realization of RF-MEMS switched capacitors. The proposed device uses a tilting metal beam combined with a non-linear electrostatic force generated by a DC voltage to maintain the device in two stable mechanical positions. Fabricated devices with relatively simple processing exhibit very low loss and a capacitive contrast of 8.5. Actuation requires only voltage pulses, toggling the device from one position to the other. Actuation voltages, both static and pulsed are in good agreement with simple mechanical modeling.