Ku Band DMTL Medium Power Phase Shifters

Fabien Maury (1) , Arnaud Pothier (1) , Jean-Christophe Orlianges (1) , David Mardivirin (1) , Tibault Reveyrand (2) , F. Conseil (3) , Pierre Blondy (1)

1 MINACOM
2 C2S2
3 MBDA - MBDA France

The first part of this paper deals with curled shunt capacitive MEMS switched varactors with good power handling capabilities. These devices have been able to achieve 1 billion cycles under 5 W in hot switching conditions. These cantilevers have been used as switched capacitors periodically loaded along a Coplanar Wave Guide (CPW) line to form a Distributed MEMS Transmission Line (DMTL) phase shifter. In the second part, the integration of these beams in 90° and 180° DMTL sections operating at 15 GHz is shown. For these respective configurations, phase shifts of 89.3° and 178° have been observed and validate this conception. With reasonable loss of 60°/dB, these devices are among the first MEMS based phase shifter in literature able to operate at such power level in hot s witching conditions.

Fabien Maury, Arnaud Pothier, Jean-Christophe Orlianges, David Mardivirin, Tibault Reveyrand, et al.. Ku Band DMTL Medium Power Phase Shifters. IEEE MTT-S Digest, IMS 2009, TH1E-3, Jun 2009, Boston - Massachusetts, France. pp. 1153-1156, ⟨10.1109/MWSYM.2009.5165906⟩. ⟨hal-00758893⟩