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Radio frequency sputtered Al: ZnO-Ag transparent conductor: A plasmonic nanostructure with enhanced optical and electrical properties

Anna Sytchkova 1 Marie-Luisa Grilli 1 Antonio Rinaldi 1 Sylvain Vedraine 2 Philippe Torchio 3 Angela Piegari 1 François Flory 4
2 Equipe Optoélectronique et Photovoltaïque
IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
3 OPTO-PV
IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
4 OptoPV
IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
Abstract : Optimization of metal-based transparent conductors (MTCs) made of silver and aluminium-doped zinc oxide (AZO) prepared by radio-frequency (r.f.) sputtering has been carried out through tuning of metal film properties. The influence of morphology and related plasmonic features of AZO/Ag/AZO MTCs on their optical and electrical performance is demonstrated and it is shown that the nominal thickness of the silver layer itself is not the most crucial value determining the MTC performance. The MTC performance has been optimized by a search of deposition conditions ensuring fractal-type metal layer formation up to a certain coalescence state that enables full gaining from silver optical properties, including its plasmonic features. For 150 W- and 200 W-deposited silver, MTCs with maximum transmittance as high as 83.6% have been obtained. These coatings have a figure of merit as good as 0.01 Ω−1 and a remarkably wide spectral transparency region: transmittance higher than 70% down to 1200 nm for 200W-samples. Modelling of the MTC coatings is proposed additionally, based on variable angle spectroscopic ellipsometric measurements, which takes into account the variation of the optical properties of silver when deposited in various conditions and embedded in a semiconductor stack.
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https://hal-unilim.archives-ouvertes.fr/hal-00911152
Contributeur : Sylvain Vedraine <>
Soumis le : jeudi 28 novembre 2013 - 18:27:33
Dernière modification le : mardi 3 avril 2018 - 17:22:08

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Anna Sytchkova, Marie-Luisa Grilli, Antonio Rinaldi, Sylvain Vedraine, Philippe Torchio, et al.. Radio frequency sputtered Al: ZnO-Ag transparent conductor: A plasmonic nanostructure with enhanced optical and electrical properties. Journal of Applied Physics, American Institute of Physics, 2013, 114, pp.094509. ⟨10.1063/1.4820266⟩. ⟨hal-00911152⟩

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