A surface mountable membrane supported filter

Matthieu Chatras (1) , Pierre Blondy (1) , Dominique Cros (1) , Olivier Vendier (2) , Jean-Louis Cazaux (2)

1 IRCOM - Institut de Recherche en Communications Optiques et Microondes
2 TAS - Thales Alenia Space [Toulouse]

A silicon micro-machined filter with a simple planar integration on an other substrate is proposed in this article. The excitation is made from the top of the shielding substrate of a membrane supported micro-machined filter. Packaging and inter-connection are included in the design. Experimental results are presented on a two pole 30 GHz, 4% fractional bandwidth filter with a quality factor of 602 and insertion loss of 1.8 dB. Such a filter can be easily integrated in any circuit using flip-chip technology.

Domaines: Sciences de l'ingénieur [physics]

Matthieu Chatras, Pierre Blondy, Dominique Cros, Olivier Vendier, Jean-Louis Cazaux. A surface mountable membrane supported filter. IEEE Microwave and Wireless Components Letters, 2003, 13 (12), pp.535-537. ⟨10.1109/LMWC.2003.818528⟩. ⟨hal-00915995⟩