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A surface mountable membrane supported filter
Abstract : A silicon micro-machined filter with a simple planar integration on an other substrate is proposed in this article. The excitation is made from the top of the shielding substrate of a membrane supported micro-machined filter. Packaging and inter-connection are included in the design. Experimental results are presented on a two pole 30 GHz, 4% fractional bandwidth filter with a quality factor of 602 and insertion loss of 1.8 dB. Such a filter can be easily integrated in any circuit using flip-chip technology.
https://hal-unilim.archives-ouvertes.fr/hal-00915995
Contributeur : Matthieu Chatras <>
Soumis le : lundi 9 décembre 2013 - 15:39:46
Dernière modification le : lundi 2 avril 2018 - 18:30:01
Contributeur : Matthieu Chatras <>
Soumis le : lundi 9 décembre 2013 - 15:39:46
Dernière modification le : lundi 2 avril 2018 - 18:30:01
