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A surface mountable membrane supported filter

Abstract : A silicon micro-machined filter with a simple planar integration on an other substrate is proposed in this article. The excitation is made from the top of the shielding substrate of a membrane supported micro-machined filter. Packaging and inter-connection are included in the design. Experimental results are presented on a two pole 30 GHz, 4% fractional bandwidth filter with a quality factor of 602 and insertion loss of 1.8 dB. Such a filter can be easily integrated in any circuit using flip-chip technology.
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Article dans une revue
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https://hal-unilim.archives-ouvertes.fr/hal-00915995
Contributeur : Matthieu Chatras <>
Soumis le : lundi 9 décembre 2013 - 15:39:46
Dernière modification le : lundi 2 avril 2018 - 18:30:01

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Matthieu Chatras, Pierre Blondy, Dominique Cros, Olivier Vendier, Jean-Louis Cazaux. A surface mountable membrane supported filter. IEEE Microwave and Wireless Components Letters, Institute of Electrical and Electronics Engineers, 2003, 13 (12), pp.535-537. ⟨10.1109/LMWC.2003.818528⟩. ⟨hal-00915995⟩

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