Carbon based multi-functional materials towards 3D system integration. Application to thermal and interconnect management

Dominique Baillargeat (1) , Wl Chow (2) , Cc Yap (2) , D. Tan (2) , M. Shakerzadeh (2) , Mk Samani (3) , Christophe Brun (1) , Eht Teo (3) , Bk Tay (2)

1 XLIM-MINACOM - MINACOM
2 CINTRA / SEEE Nanyang Technological University
3 NTU - Nanayang Technological University

Domaines: Micro et nanotechnologies/Microélectronique

Dominique Baillargeat, Wl Chow, Cc Yap, D. Tan, M. Shakerzadeh, et al.. Carbon based multi-functional materials towards 3D system integration. Application to thermal and interconnect management. Microwave Symposium Digest (MTT), 2012 IEEE MTT-S International, Jun 2012, France. pp.1-3. ⟨hal-00922179⟩