MICROELECTROMECHANICAL SYSTEM WITH AIR GAP

Abstract : The present invention relates to an microelectromechanical system (1) comprising: a base (15) comprising a substrate (20) and a substrate electrode (40); a moveable beam (30); a voltage generator (10) able to generate a potential difference between the beam (30) and the substrate electrode (40); and at least one mechanical stop (70) connected to the beam and designed to make contact with the base (15) when a potential difference is applied between the beam (30) and the substrate electrode (40), thereby defining an air- ...
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https://hal-unilim.archives-ouvertes.fr/hal-00922828
Contributeur : Valérie Madrangeas <>
Soumis le : lundi 30 décembre 2013 - 22:04:07
Dernière modification le : jeudi 11 janvier 2018 - 06:26:39

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  • HAL Id : hal-00922828, version 1

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Citation

Pierre Blondy, Stanis Courrèges, Arnaud Pothier, Jean-Christophe Orlianges. MICROELECTROMECHANICAL SYSTEM WITH AIR GAP. Patent n° : 2012020095. 2012. ⟨hal-00922828⟩

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