Xavier Landreau, B. Lanfant, Thérèse Merle-Méjean, G. Bouscarrat, Z. Bouchkour, et al.. Depositon of nanometric SiOxHyCz films at different substrate temperatures by an atmospheric pressure microwave plasma torch (TIA) : first steps towards self-assembled 3-dimensional nano-sensors.
19th Annual International Conference on Composites or Nano-Engeneering (ICCE-19), Jul 2011, Shanghaï, China. pp.747.
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