Depositon of nanometric SiOxHyCz films at different substrate temperatures by an atmospheric pressure microwave plasma torch (TIA) : first steps towards self-assembled 3-dimensional nano-sensors

Xavier Landreau , B. Lanfant , Thérèse Merle-Méjean (1) , G. Bouscarrat , Z. Bouchkour (2) , Christelle Dublanche-Tixier (3) , Cédric Jaoul (3) , Pascal Tristant (3)

1 SPCTS-AXE3 - Axe 3 : organisation structurale multiéchelle des matériaux
2 SPCTS - Science des Procédés Céramiques et de Traitements de Surface
3 Axe 2 : procédés de traitements de surface

Domaines: Matériaux

Xavier Landreau, B. Lanfant, Thérèse Merle-Méjean, G. Bouscarrat, Z. Bouchkour, et al.. Depositon of nanometric SiOxHyCz films at different substrate temperatures by an atmospheric pressure microwave plasma torch (TIA) : first steps towards self-assembled 3-dimensional nano-sensors. 19th Annual International Conference on Composites or Nano-Engeneering (ICCE-19), Jul 2011, Shanghaï, China. pp.747. ⟨hal-00944747⟩