Morphological and optical properties of AIN nano-islands prepared by plasma enhanced chemical vapor deposition

Z. Bouchkour (1) , Jean-Christophe Orlianges (2) , Christelle Dublanche-Tixier (2) , Elsa Thune (3) , Etienne Laborde (1) , Cédric Jaoul (2) , René Guinebretière (3) , Pascal Tristant (2)

1 SPCTS - Science des Procédés Céramiques et de Traitements de Surface
2 Axe 2 : procédés de traitements de surface
3 SPCTS-AXE3 - Axe 3 : organisation structurale multiéchelle des matériaux

Domaines: Matériaux

Z. Bouchkour, Jean-Christophe Orlianges, Christelle Dublanche-Tixier, Elsa Thune, Etienne Laborde, et al.. Morphological and optical properties of AIN nano-islands prepared by plasma enhanced chemical vapor deposition. 40th International Conference on Metallurgical Coatings and Thin films (ICMCTF), Apr 2013, San Diego, United States. ⟨hal-00949362⟩