Cédric Jaoul, Frédéric Meunier, Pascal Tristant, J.P. Lavoute, Etienne Laborde, et al.. Physical vapor partial filtering for chemical composition control in hybrid PECVD/EB-PVD process.
40th International Conference on Metallurgical Coatings and Thin films (ICMCTF), Apr 2013, San Diego, United States.
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