Physical vapor partial filtering for chemical composition control in hybrid PECVD/EB-PVD process

Cédric Jaoul (1) , Frédéric Meunier , Pascal Tristant (1) , J.P. Lavoute (2) , Etienne Laborde (2) , Christelle Dublanche-Tixier (1)

1 Axe 2 : procédés de traitements de surface
2 SPCTS - Science des Procédés Céramiques et de Traitements de Surface

Domaines: Matériaux

Cédric Jaoul, Frédéric Meunier, Pascal Tristant, J.P. Lavoute, Etienne Laborde, et al.. Physical vapor partial filtering for chemical composition control in hybrid PECVD/EB-PVD process. 40th International Conference on Metallurgical Coatings and Thin films (ICMCTF), Apr 2013, San Diego, United States. ⟨hal-00949365⟩