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Physical vapor partial filtering for chemical composition control in hybrid PECVD/EB-PVD process

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Chimie Matériaux
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Dates et versions

hal-00949365 , version 1 (19-02-2014)

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  • HAL Id : hal-00949365 , version 1

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Cédric Jaoul, Frédéric Meunier, Pascal Tristant, J.P. Lavoute, Etienne Laborde, et al.. Physical vapor partial filtering for chemical composition control in hybrid PECVD/EB-PVD process. 40th International Conference on Metallurgical Coatings and Thin films (ICMCTF), Apr 2013, San Diego, United States. ⟨hal-00949365⟩
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