AlN, ZnO thin films and AlN/ ZnO or ZnO/AlN multilayer structures deposited by PLD for surface acoustic wave devices

Perrine Dutheil 1 Jean-Christophe Orlianges 1 Aurelian Crunteanu 2 Alain Catherinot 1 Corinne Champeaux 1
1 Axe 2 : procédés de traitements de surface
SPCTS - Science des Procédés Céramiques et de Traitements de Surface
2 XLIM-MINACOM - MINACOM
XLIM - XLIM
Abstract : Surface acoustic wave (SAW) devices were fabricated on ZnO and AlN thin films deposited on C-sapphire substrates by pulsed laser deposition at 700°C. The experimental results showed that AlN and ZnO films are (0002)-oriented and surface acoustic wave velocity on C-sapphire is respectively equal to 5060 m.s-1 for AlN and to 5350 m.s-1 for ZnO. Multilayer structures AlN/ZnO and ZnO/AlN are also realized on C-sapphire and investigated by X-ray diffraction, SEM observations, spectroscopic ellipsometry and transmission measurements. Ellipsometry analysis shows an intermediate layer between AlN and ZnO thin films for AlN/ZnO multilayer; this one doesn’t lead to a change in crystalline structure or piezoelectric property of multilayer. In fact, analyses of the SAW devices revealed that Rayleigh waves were detected and their resonant frequencies are the same for both multilayers and in agreement with those measured for ZnO or AlN thin films in SAW filters.
Keywords : AlN ZnO multilayer PLD SAW devices ellipsometry
Type de document :
Article dans une revue
Liste complète des métadonnées
https://hal-unilim.archives-ouvertes.fr/hal-01155620
Contributeur : Aurelian Crunteanu <>
Soumis le : mercredi 27 mai 2015 - 08:29:40
Dernière modification le : mardi 12 novembre 2019 - 13:28:09

Lien texte intégral

istex

Identifiants

Collections

UNILIM | SPCTS-AXE2 | IPAM | SPCTS | XLIM | IRCER | IRCER-AXE2

Citation

Perrine Dutheil, Jean-Christophe Orlianges, Aurelian Crunteanu, Alain Catherinot, Corinne Champeaux. AlN, ZnO thin films and AlN/ ZnO or ZnO/AlN multilayer structures deposited by PLD for surface acoustic wave devices. physica status solidi (a), Wiley, 2015, Phys. Status Solidi A, 1–9 (2015), pp.1-9. ⟨10.1002/pssa.201431747⟩. ⟨hal-01155620⟩

Exporter

BibTeX TEI DC DCterms EndNote

Partager

Métriques

Consultations de la notice

198

Université de Limoges
33 rue François Mitterrand
BP 23204
87032 Limoges - France
Tél. +33 (5) 05 55 14 91 00
université ouverte
source de réussites

Contact : svp-scd@unilim.fr

CONTACT

CCSD