AlN, ZnO thin films and AlN/ ZnO or ZnO/AlN multilayer structures deposited by PLD for surface acoustic wave devices

Perrine Dutheil 1 Jean-Christophe Orlianges 1 Aurelian Crunteanu 2 Alain Catherinot 1 Corinne Champeaux 1
1 Axe 2 : procédés de traitements de surface
SPCTS - Science des Procédés Céramiques et de Traitements de Surface
Abstract : Surface acoustic wave (SAW) devices were fabricated on ZnO and AlN thin films deposited on C-sapphire substrates by pulsed laser deposition at 700°C. The experimental results showed that AlN and ZnO films are (0002)-oriented and surface acoustic wave velocity on C-sapphire is respectively equal to 5060 m.s-1 for AlN and to 5350 m.s-1 for ZnO. Multilayer structures AlN/ZnO and ZnO/AlN are also realized on C-sapphire and investigated by X-ray diffraction, SEM observations, spectroscopic ellipsometry and transmission measurements. Ellipsometry analysis shows an intermediate layer between AlN and ZnO thin films for AlN/ZnO multilayer; this one doesn’t lead to a change in crystalline structure or piezoelectric property of multilayer. In fact, analyses of the SAW devices revealed that Rayleigh waves were detected and their resonant frequencies are the same for both multilayers and in agreement with those measured for ZnO or AlN thin films in SAW filters.
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https://hal-unilim.archives-ouvertes.fr/hal-01155620
Contributeur : Aurelian Crunteanu <>
Soumis le : mercredi 27 mai 2015 - 08:29:40
Dernière modification le : mardi 12 novembre 2019 - 13:28:09

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Perrine Dutheil, Jean-Christophe Orlianges, Aurelian Crunteanu, Alain Catherinot, Corinne Champeaux. AlN, ZnO thin films and AlN/ ZnO or ZnO/AlN multilayer structures deposited by PLD for surface acoustic wave devices. physica status solidi (a), Wiley, 2015, Phys. Status Solidi A, 1–9 (2015), pp.1-9. ⟨10.1002/pssa.201431747⟩. ⟨hal-01155620⟩

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