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Article Dans Une Revue Microsystem Technologies Année : 2016

A study on controllable aluminum doped zinc oxide patterning by chemical etching for MEMS application

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hal-01264439 , version 1 (29-01-2016)

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A.A Ralib, A.N Nordin, N.A Malik, R Othman, A.H.M Zahirul Alam, et al.. A study on controllable aluminum doped zinc oxide patterning by chemical etching for MEMS application . Microsystem Technologies, 2016, ⟨10.1007/s00542-015-2783-1⟩. ⟨hal-01264439⟩
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