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Article Dans Une Revue Journal of Applied Physics Année : 2017

Understanding of one dimensional ordering mechanisms at the (001) sapphire vicinal surface

Résumé

Vicinal sapphire surfaces with 1°, 5°, or 10° miscut angle from the (00l) planes have been annealed under different atmospheres in the temperature range from 1000 to 1500 °C for a long time (from 30 min to 64 h). A systematic study by atomic force microscopy observations and grazing incidence small angle x-ray scattering measurements is undertaken in order to establish the influence of the miscut angle and the thermal conditions on the one dimensional (1D) ordering of the surface and on the resulting surface morphology. Several stages are identified in the evolution of the step period. First, after a very short time τ of thermal treatment, the surface reaches a periodic structure which corresponds to the self-ordering of single steps. Then, the step-bunching occurs, and the step period Λ increases following a power-law Λ=Λ0(t−ττ)nΛ=Λ0(t−ττ)n. Respect to the miscut angle, we identified several mechanisms of mass transport. Indeed, for surfaces with a miscut angle of 1°, the kinetics of step-bunching is controlled by diffusion of aluminum atoms, while, for miscut angles equal to 5° and 10°, the kinetics of step diffusion mechanism is governed by diffusion of oxygen atoms at the surface.
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Dates et versions

hal-01482416 , version 1 (03-03-2017)

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Elsa Thune, Ahmad Fakih, Caroline Matringe, David Babonneau, René Guinebretière. Understanding of one dimensional ordering mechanisms at the (001) sapphire vicinal surface. Journal of Applied Physics, 2017, 121 (1), pp.015301. ⟨10.1063/1.497334⟩. ⟨hal-01482416⟩
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