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Article Dans Une Revue Journal of Applied Physics Année : 2017

Contribution of optical emission spectroscopy measurements to the understanding of TiO 2 growth by chemical vapor deposition using an atmospheric-pressure plasma torch

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hal-01886094 , version 1 (02-10-2018)

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Christophe Chazelas, C. Dublanche-Tixier, P. Tristant, Yoan Gazal. Contribution of optical emission spectroscopy measurements to the understanding of TiO 2 growth by chemical vapor deposition using an atmospheric-pressure plasma torch. Journal of Applied Physics, 2017, 121 (12), ⟨10.1063/1.4979024⟩. ⟨hal-01886094⟩
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