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Titanium dioxide films deposited by an atmospheric pressure PECVD torch: comparison of the static and the dynamic modes

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hal-01898632 , version 1 (18-10-2018)

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  • HAL Id : hal-01898632 , version 1

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Amelie Perraudeau, Christelle Dublanche-Tixier, Christophe Chazelas, Pascal Tristant. Titanium dioxide films deposited by an atmospheric pressure PECVD torch: comparison of the static and the dynamic modes. CIP MIATEC 2017, Jun 2017, Nice, France. ⟨hal-01898632⟩
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