Epitaxial ferroelectric PZT and BST thin films by pulsed UV laser deposition

C. Champeaux (1) , P. Marchet (1) , A. Catherinot (1)

1 LMCTS - Laboratoire de Matériaux Céramiques et Traitements de Surface

Ferroelectric PbZr Ti ,,52 0,4803 (PZT) and Ba,,,,Sr,,,,TiO, (BST) thin films are prepared by laser ablation of sintered ceramic targets. The influence of the substrate temperature during deposition on the composition and the crystallographic structure is investigated for different substrates, in order to achieve an oriented or epitaxial growth.

Domaines: Matériaux

C. Champeaux, P. Marchet, A. Catherinot. Epitaxial ferroelectric PZT and BST thin films by pulsed UV laser deposition. Applied Surface Science, 1996, 96-98, pp.775 - 778. ⟨10.1016/0169-4332(95)00553-6⟩. ⟨hal-02296068⟩