Amelie Perraudeau, Christelle Dublanche-Tixier, Pascal Tristant, Christophe Chazelas. Dynamic mode optimization for the deposition of homogeneous TiO2 thin film by atmospheric pressure PECVD using a microwave plasma torch.
Applied Surface Science, Elsevier, 2019, 493, pp.703-709.
⟨10.1016/j.apsusc.2019.07.057⟩.
⟨hal-02475685⟩