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Article Dans Une Revue Journal of Materials Science: Materials in Electronics Année : 2017

Enhanced piezoelectric properties of aluminium doped zinc oxide thin film for surface acoustic wave resonators on a CMOS platform

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hal-01566404 , version 1 (21-07-2017)

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  • HAL Id : hal-01566404 , version 1

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A.A Ralib, Oussama Mortada, Jean-Christophe Orlianges, Aurelian Crunteanu, Matthieu Chatras, et al.. Enhanced piezoelectric properties of aluminium doped zinc oxide thin film for surface acoustic wave resonators on a CMOS platform. Journal of Materials Science: Materials in Electronics, 2017, 28 (12), pp.9132-9138. ⟨hal-01566404⟩
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