Arrays of GeTe Electrically Activated RF Switches

Areski Ghalem; Ahmad Hariri; Cyril Guines; Damien Passerieux; Laure Huitema; Pierre Blondy; Aurelian Crunteanu

Arrays of GeTe Electrically Activated RF Switches

Areski Ghalem ¹ Ahmad Hariri ¹ Cyril Guines ² Damien Passerieux ² Laure Huitema ³ Pierre Blondy ¹ Aurelian Crunteanu ¹

1 XLIM-RFEI - RF-ELITE : RF-Electronique Imprimée pour les Télécommunications et l'Energie

XLIM - XLIM : RFEI

2 XLIM - XLIM

3 XLIM-SRF - Systèmes RF

XLIM - XLIM : SRF

Abstract : We report the fabrication and the high-frequency characterization of four-terminals GeTe -phase change material RF switches. The device integrates an indirect heating system for reversible changing the GeTe material’s state from crystalline to amorphous. We show that the dimensions of the GeTe patterns have to be optimized for obtaining high on-state resistances of a single device and proper RF performances. For an electrical activation of an initially crystalline GeTe pattern to its amorphous state we used an electrical pulse with a 500 ns duration and 60 mA intensity resulting in switches having 7fF off-state capacitance. The reverse process (switch turned to the ON state) requires an electrical pulse of 3 µs and 40 mA intensity, resulting in an on-state resistance of 36Ω. We demonstrate that arrays of similar 8-switches present very good performances, with 0.8 dB of insertion loss and 25 dB of isolation at 5 GHz.

Type de document :

Communication dans un congrès

IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes (IMWS-AMP 2017), 20-22 September 2017, Pavia, Italy, Sep 2017, Pavia, Italy. 2017

Domaine :

Sciences de l'ingénieur [physics] / Micro et nanotechnologies/Microélectronique

Sciences de l'ingénieur [physics] / Electromagnétisme

Liste complète des métadonnées

https://hal-unilim.archives-ouvertes.fr/hal-01611519
Contributeur : Aurelian Crunteanu <>
Soumis le : vendredi 6 octobre 2017 - 05:25:08
Dernière modification le : jeudi 11 janvier 2018 - 06:27:38

Arrays of GeTe Electrically Activated RF Switches

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