Bi-stable RF-MEMS Switched Capacitor Based on Metal-to-Metal Stiction

Achref Yahiaoui (1) , Arnaud Pothier (2) , Pierre Blondy (2)

1 XLIM - XLIM
2 XLIM-MINACOM - MINACOM

This paper presents a new concept for the realization of a bi-stable RF-MEMS switched capacitor using a resistive contact. The main idea is to maintain the device in a given position using metal-to-metal stiction. The metal-to-metal contact is used only for mechanical purposes and has no electrical function. 20 Volts, 10 μsec pulses are used to switch the device from one stable position to the other. After disconnection, the device maintains its position with extremely little change over long periods. 0.06% on-state capacitance relative shift has been measured over 4 days with daily control, and lab environment closet storage. 5 minutes periodic cycling shows very little drift in both states of the RF-MEMS capacitor. Moreover, the device is fabricated using MEMS conventional processing steps permits to obtain capacitive contrast of 3.

Domaines: Micro et nanotechnologies/Microélectronique

Achref Yahiaoui, Arnaud Pothier, Pierre Blondy. Bi-stable RF-MEMS Switched Capacitor Based on Metal-to-Metal Stiction. IEEE International Microwave Symposium: IMS 2013, Jun 2013, Seatle, United States. ⟨hal-00912310⟩