Miniature RF MEMS switched Capacitors using Nanogaps to achieve 50ns switching Speed Capabilities

Arnaud Pothier (1) , Aurélie Verger (1) , Cyril Guines (1) , Aurelian Crunteanu (1) , Pierre Blondy (1) , Jean-Christophe Orlianges (2) , Jérémy Dhennin (3) , Adrien Broué (3) , Frédéric Courtade (4) , Olivier Vendier (5)

1 MINACOM
2 Axe 2 : procédés de traitements de surface
3 Fialab
4 CNES - Centre National d'Études Spatiales [Toulouse]
5 TAS - Thales Alenia Space [Toulouse]

Domaines: Micro et nanotechnologies/Microélectronique

Arnaud Pothier, Aurélie Verger, Cyril Guines, Aurelian Crunteanu, Pierre Blondy, et al.. Miniature RF MEMS switched Capacitors using Nanogaps to achieve 50ns switching Speed Capabilities. ESA Round Table on Micro and Nano Technology, Sep 2010, Noordwijk, Netherlands. ⟨hal-00933632⟩